For example: Agilent E4440A or Anritsu 68369
Impedance Analyzer 1 MHz to 1000 MHz
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Keysight / Agilent 4191A Overview
The 4191A RF Impedance Analyzer measures 14 parameters with a maximum resolution of 4 1/2-digits. The internal synthesizer provides variable frequencies from 1MHz to 1000MHz covering the UHF, VHF and video bands with automatic sweep capability.
Keysight / Agilent 4191A Options
002= 100Hz/200Hz resolution synthesizer
Keysight / Agilent 4191A All Available Options 
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