For example: Agilent E4440A or Anritsu 68369
Precision Semiconductor Parameter Analyzer
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Keysight / Agilent 4156A Overview
The 4156A features: High-resolution/accuracy and wide range. I: 1 fA to 1 A (20 fA offset accuracy), V: 1µV to 200 V; Fully-automated I-V sweep measurements with dc or pulse mode, expandable up to 6 SMUs; Synchronized stress/measure function, two high-voltage pulse generator units (±40 V); Time-domain measurement: 60µsvariable intervals, up to 10,001 points; Easy to use: knob-sweep similar to curve tracer, automatic analysis functions; Automation: built-in HP Instrument BASIC, trigger I/O capability.
Keysight / Agilent 4156A All Available Options 
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