For example: Agilent E4440A or Anritsu 68369
LCR Meter 1MHz-1GHz
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Keysight / Agilent 4286A Overview
The 4286A RF LCR meter offers accurate and reliable measurements in order to improve the quality and performance of your electronic components or circuit design. The Agilent 4286A employs direct-current voltage-measurement technique, as opposed to the reflection-measurement technique, for more accurate impedance measurements over wide impedance range. Also, Q measurement can be much improved due to advanced calibration technique (typical Q accuracy: 6% @ 100 MHz, Q=100). So you can reduce the design uncertainty by measuring your device's true impedance values at RF range.
Features:
- 1 MHz to 1 GHz, with 10 kHz steps
- 1% basic accuracy
- High-speed measurements: 15ms
- 1 m/3 m errorless cable with APC-3.5 test head
Keysight / Agilent 4286A All Available Options 
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