For example: Agilent E4440A or Anritsu 68369
Agilent E8361C PNA Microwave Network Analyzer
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Keysight / Agilent E8361C Overview
General-purpose network analysis with optional software and/or hardware to customize for your application - such as multiport, pulsed-RF, etc.
Features:
- 10 MHz to 67 GHz
- 94 dB of dynamic range and <0.006 dB trace noise (specified to 67 GHz, with operation to 70 GHz)
- <26 usec/point measurement speed, 32 channels, 20,001 points
- TRL/LRM calibration, on-wafer, in-fixture, waveguide, and antenna.measurements
- Mixer conversion loss, return loss, isolation, and absolute group delay
- Amplifier gain compression, harmonic, IMD, and pulsed-RF
Keysight / Agilent E8361C All Available Options 
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