For example: Agilent E4440A or Anritsu 68369
Microwave VNA 45MHz- 40GHz
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Keysight / Agilent E8363C Overview
General-purpose network analysis with optional software and/or hardware to customize for your application - such as multiport, pulsed-RF, etc.
Features:
- 10 MHz to 40 GHz
- 110 dB of dynamic range <0.006 dB trace noise
- <26 usec/point measurement speed, 32 channels, 20,001 points
- TRL/LRM calibration, on-wafer, in-fixture, waveguide, and antenna measurements
- Mixer conversion loss, return loss, isolation, and absolute group delay
- Amplifier gain compression, harmonic, IMD, and pulsed-RF
Keysight / Agilent E8363C All Available Options 
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