For example: Agilent E4440A or Anritsu 68369
Microwave Network Analyzer 10MHz-50Ghz
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Keysight / Agilent E8364B Overview
General-purpose network analysis with optional software and/or hardware to customize for your application - such as multiport, pulsed-RF, etc.
Discuss calibration, applications, programming topics: Network Analyzer Discussion Forum
Support: PNA Series Service & Support
Features:
- 104 dB of dynamic range and <0.006 dB trace noise
- <26 usec/point measurement speed, 32 channels, 16,001 points
- TRM/LRM calibration for the most accurate on-wafer, in-fixture, waveguide and antenna measurements
- Mixer conversion loss, return loss, isolation, and absolute group delay
- Amplifier gain compression, harmonic, IMD, and pulsed-RF
Keysight / Agilent E8364B All Available Options 
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