JEOL JSM-6701F Overview
- High resolution: 1 nm (15 kV), 2.2 nm (1 kV)
- High resolution even at large probe current for analysis
- Completely automated electron optics
- Maximum 2 nA probe current without changing objective lens aperture size
- Specimen chamber for up to 200 mm diameter specimen
- High stability large eucentric specimen stage with motorized control
- Large specimen exchange air lock chamber
- One action specimen exchange mechanism
- Large LCD display with 1,280 1,024 pixel resolution
- Compatible with network
