For example: Agilent E4440A or Anritsu 68369
Bridge
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IET 1615A Overview
The 1615A Capacitance Bridge is an accurate, high-precision bridge for the measurement and intercomparison of standard capacitors, circuit component capacitors, or dielectric materials. Capacitance range is 10E-17 F to 1.11 ?F in six ranges, direct reading. Conductance range is 10E-06 ?mhos to 100 ?mhos (two positive ranges, two negative ranges). Conductance range varies with capacitance range. Frequency is approximately 50Hz to 10kHz. Dissipation factor at 1 kHz is 0.000001:1.
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