For example: Agilent E4440A or Anritsu 68369
Semiconductor Device Parameter Analyzer (Characterization System) Mainframe/EasyEXPERT


Manufactured by: Keysight / Agilent

Category:Semiconductor Equipment

Keysight / Agilent B1500A Overview

The Agilent B1500A Semiconductor Device Analyzer is a modular instrument with a ten-slot configuration that supports both IV and CV measurements and also fast high-voltage pulsing. Its familiar, Microsoft ® Windows ® user interface supports Agilent’s EasyEXPERT software, which provides a new, more intuitive task-oriented approach to device characterization. Because of its extremely low-current, low-voltage, and integrated capacitance measurement capabilities, the Agilent B1500A can be used for a wide range of semiconductor device characterization needs (IC-CAP supports the B1500A). It is also an excellent solution for non-volatile memory cell characterization and high-speed device characterization (including advanced NBTI and RTS noise (RTN) measurement).

Features and Benefits

  • Superior IV measurement performance: 0.1 fA / 0.5 µV measurement resolution
  • Measurement features include single and multi-channel sweep, time sampling, list sweep, quasi-static CV (using the SMUs), direct control and arbitrary linear waveform generation (ALWG) GUI for the HV-SPGUs.
  • Optional, integrated capacitance module supports CV measurements up to 5 MHz
  • Optional positioner-based CV-IV switching solutions available with 0.5 µV voltage measurement resolution and 10 fA, 1 fA or 0.1 fA current measurement resolution capability
  • Easy test automation with built-in semiautomatic wafer prober drivers and test sequencing without programming via the Quick Test mode
  • Optional high-voltage semiconductor pulse generator unit (HV-SPGU) available with 10 ns programmable pulse widths and +/- 40 V (80 V peak-to-peak) output.
  • Optional waveform generator/fast measurement unit (WGFMU) available with ALWG and fast current or voltage measurement capabilities.
  • 10 ns pulsed IV solution is available for characterizing high-k gate dielectric and SOI (silicon-on-insulator) transistors.
  • A Classic Test mode is available to provide the look, feel, and terminology of the 4155/4156 interface while enhancing user interaction by taking full advantage of Microsoft ® Windows ® GUI features

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General Features

  • PC-based instrument with Windows®XP Professional OS and EasyEXPERT software
  • Single-box solution for current-voltage (IV), capacitance-voltage (CV), pulse generation, fast IV, and time-domain measurement.
  • Ten module slots for source monitor units (SMUs) and other module types (MFCMU, HV-SPGU and WGFMU)
  • Offline data analysis and application test development via Desktop EasyEXPERT software

Measurement Capabilities

  • Supports current-voltage (IV) measurement to 0.1fA and 0.5µV
  • Supports both quasi-static and medium-frequency capacitance-voltage (CV) measurement
  • Supports accurate fast IV and time-domain measurement for a wide range of applications such as pulsed IV, NBTI and RTS noise (RTN) measurement.
  • Supports high voltage pulse generation (up to ±40 V) for high power and memory device testing.

Keysight / Agilent B1500A Options

Configuration Details:
o B1500A Mainframe
o (x1) B1520A Capacitance Measurement Unit (CMU)
o (x1) B1511B Mid Power Source Monitor Unit (SMU)
o (x5) B1517A High Resolution source Monitor Unit (SMU)
o (x2) B1525A Pulse Generator Unit (PGU)

Keysight / Agilent B1500A All Available Options Expand

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